Arzikulov E.U, Sharafova T. S, and Norjigitova M. “AMORPHOLISM OF SILICON CRYSTAL WHEN IMPLANTED WITH LIGHT IONS”. Galaxy International Interdisciplinary Research Journal, vol. 9, no. 10, Oct. 2021, pp. 15-18, https://giirj.com/index.php/giirj/article/view/285.